Patent · US Active

Optical modulator

US8873895B2 · kind B2 · utility

7Cited by
3References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 1, 2011
Grant dateOct 28, 2014
Priority date
Expiry dateAug 23, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/02
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

To provide an optical modulator having a reduced size and reduced power consumption and capable of being easily connected to a waveguide and a method of manufacturing the optical modulator. The optical modulator has at least semiconductor layer (8) having a rib-shaped portion and doped so as to be of a first conduction type, dielectric layer (11) laid on first-conduction-type semiconductor layer (8), and semiconductor layer (9) laid on dielectric layer (11), having the width at the side opposite from dielectric layer (11) increased relative to the width of the rib-shaped portion, and doped so as to be of a second conduction type.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.