Electronic damper circuit for MEMS sensors and resonators
US8875578B2 · kind B2 · utility
23Cited by
11References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 26, 2011 |
| Grant date | Nov 4, 2014 |
| Priority date | — |
| Expiry date | Aug 30, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0882
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus includes a microelectromechanical system (MEMS) device including a mass anchored to a substrate. The MEMS device is configured to generate an output signal indicative of motion of the mass with respect to the substrate. The MEMS device includes a feedback module configured to provide a control signal to the MEMS device. The control signal is based on the output signal. The MEMS device is configured to apply a damping force to the mass in response to the control signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.