Processing of nanostructured devices using microfabrication techniques

US8877636B1 · kind B1 · utility

Assignee

• THE UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINSTRATOR OF THE NATIONAL AERONAUTICS AND SPACE ADMINISTRATION · US

Inventors

• Gary W. Hunter · Oberlin, US
• Jennifer C. Xu · Westlake, US
• Laura J Evans · Fairview Park, US
• Michael H Kulis · Shaker Heights, US
• Gordon Berger · Keyano, CA
• Randall L. Vander Wal · State College, US

Key dates

• Filing date: Feb 28, 2011
• Grant date: Nov 4, 2014
• Expiry date: Apr 3, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02A50/20
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Systems and methods that incorporate nanostructures into microdevices are discussed herein. These systems and methods can allow for standard microfabrication techniques to be extended to the field of nanotechnology. Sensors incorporating nanostructures can be fabricated as described herein, and can be used to reliably detect a range of gases with high response.