Patent · US Active

Process for producing semiconductive layers

US8877657B2 · kind B2 · utility

0Cited by
1References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 26, 2010
Grant dateNov 4, 2014
Priority date
Expiry dateDec 6, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/0241
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The present invention relates to a process for producing a layer comprising at least one semiconductive metal oxide on a substrate, comprising at least the steps of:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.