Patent · US Active

Method and apparatus for in situ preparation of serial planar surfaces for microscopy

US8878147B2 · kind B2 · utility

3Cited by
17References
23Claims
0Family size

Inventor

Key dates

Filing dateJan 18, 2013
Grant dateNov 4, 2014
Priority date—
Expiry dateJan 18, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/31745
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Systems and methods for preparing solid samples for analysis, such as microscopic examination in cross section or planimetric orientation. The sample preparation systems may include a sample support configured to secure a solid sample, an excitation beam source that generates an excitation beam configured to remove material from a surface of the sample, a beam shield configured to at least partially protect the sample from the excitation beam, and a beam shield holder configured to secure the beam shield, where the adjustment of the relative positions of the beam shield and sample holder permits the excitation beam to selectively expose a series of substantially planar surfaces of the sample.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.