Process for producing a liquid ejection head
US8883404B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 2, 2014 |
| Grant date | Nov 11, 2014 |
| Priority date | — |
| Expiry date | Jan 2, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/2016
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A process for producing a liquid ejection head including, on a substrate, a flow path forming member forming ejection orifices and a liquid flow path communicating therewith, including forming, on the substrate, a first layer of photosensitive resin; forming, on the first layer, a mask layer in which at least part of a side surface thereof has a light transmission distribution with a material capable of reducing transmission of light having a photosensitive wavelength of the resin; performing, for the first layer, exposure with the mask layer and development to form a flow path mold pattern having a taper angle θ satisfying 95°<θ, where θ is the angle between top and side surfaces in cross section of the pattern perpendicular to substrate surface; forming a coating resin layer to cover the pattern; patterning the resin layer to form the member; and removing the pattern to form the flow path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.