Driving at least two high frequency-power generators

US8884523B2 · kind B2 · utility

Assignee

• TRUMPF HUETTINGER GMBH + CO. KG · DE

Inventors

• Markus Winterhalter · Bad Krozingen, DE
• Ekkehard Mann · Gundelfingen, DE

Key dates

• Filing date: Nov 5, 2007
• Grant date: Nov 11, 2014
• Expiry date: Aug 12, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H1/46
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

For driving at least two HF power generators that supply a plasma process with HF power, at least one drive signal is generated and at least one pulse signal is generated. Then, based on the at least one drive signal and the at least one pulse signal, a pulsed HF power signal is generated by each of the at least two HF power generator.