Patent · US Active

Micromechanical system and method for building a micromechanical system

US8887568B2 · kind B2 · utility

2Cited by

7References

20Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Roman Forke · Chemnitz, DE
Dirk Scheibner · Nuremberg, DE
Alexey Shaporin · Chemnitz, DE

Key dates

Filing date	Apr 7, 2009
Grant date	Nov 18, 2014
Priority date	—
Expiry date	Nov 10, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0814
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical system with a system that can vibrate, has a seismic mass and at least two spring elements. The spring elements are respectively fastened on one side externally to the seismic mass and on the other side to fixed anchor points of the micromechanical system such that the seismic mass can vibrate in a movement direction. In order to obtain a particularly large frequency spacing between the useful mode and further vibration modes of the system, at least one further spring element is provided in the inner region of the seismic mass. The further spring element the is fastened to a further anchor point of the micromechanical system. A method builds a micromechanical system with a system that can vibrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.