Patent · US Active

Vibrating micromechanical system having beam-shaped element

US8887571B2 · kind B2 · utility

0Cited by

7References

15Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Marco Dienel · Oederan, DE
Roman Forke · Chemnitz, DE
Dirk Scheibner · Nuremberg, DE

Key dates

Filing date	Mar 31, 2009
Grant date	Nov 18, 2014
Priority date	—
Expiry date	Mar 13, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49007
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

An exposed end of a micromechanical system having at least one beam-shaped element is connected to a further element of the micromechanical system at the other end thereof. To optimize the mechanical properties of the micromechanical system, recesses are provided in the beam-shaped element in such a way that the mass of the beam-shaped elements decreases toward the exposed end.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.