Multiple sheath multiple capillary aerosol jet
US8887658B2 · kind B2 · utility
51Cited by
155References
14Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 8, 2008 |
| Grant date | Nov 18, 2014 |
| Priority date | — |
| Expiry date | Mar 12, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/1241
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Apparatus and method for depositing aerosolized material, wherein an aerosol flow is surrounded and focused by more than one consecutive sheath gas flows. The combined sheath and aerosol flows may consecutively flow through more than one capillary, thereby narrowing the flow further. Linewidths of less than one micron may be achieved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.