Seal plate, seal member that is used in seal plate, and method for manufacturing the same
US8888106B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2009 |
| Grant date | Nov 18, 2014 |
| Priority date | — |
| Expiry date | Jul 7, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1043
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
In a vacuum gate valve, a seal member for sealing a gate opening part is bonded to an outer edge part of a planar seal plate that is disposed in such a manner that the planar seal plate is opposed to a valve seat surface of the gate opening part and comes into contact with the valve seat surface. The seal member includes a vacuum seal part that is located on a side farther from the gate opening part and maintains the sealability of the gate opening part when the gate opening part is closed, and also includes a radical seal part that is located on a side closer to the gate opening part and that prevents the seal member from being affected by a treatment gas in the gate opening part when the gate opening part is closed. The vacuum seal part is made of a rubber elastic body, and the radical seal part is configured by providing a radical resistant body that is provided with an excellent radical resistance on the rubber elastic body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.