Method for manufacturing solar cell
US8889464B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2013 |
| Grant date | Nov 18, 2014 |
| Priority date | — |
| Expiry date | May 9, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/547
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing a solar cell includes performing a dry etching process to form a textured surface including a plurality of minute protrusions on a first surface of a semiconductor substrate, performing a first cleansing process for removing damaged portions of surfaces of the minute protrusions using a basic chemical and removing impurities adsorbed on the surfaces of the minute protrusions, performing a second cleansing process for removing impurities remaining or again adsorbed on the surfaces of the minute protrusions using an acid chemical after performing the first cleansing process, and forming an emitter region at the first surface of the semiconductor substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.