Pressure measuring instrument
US8893555B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 8, 2012 |
| Grant date | Nov 25, 2014 |
| Priority date | — |
| Expiry date | Jun 28, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.