Infrared detector based on suspended bolometric micro-plates
US8895924B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 15, 2011 |
| Grant date | Nov 25, 2014 |
| Priority date | — |
| Expiry date | Jul 30, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2207/101
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared or terahertz wavelengths comprises a substrate and an array of bolometric micro-plates for detecting said radiation that are suspended above the substrate by support arms. It comprises a metallic membrane located above and around each micro-plate and in which openings are formed; said openings in metallic membrane are periodically located in it along at least one predetermined axis with a period equal to or less thanwhere λ is a wavelength in the wavelength range that is to be detected and n is the average refraction index of the medium that separates the micro-plate from metallic membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.