Bolometric detector of an electromagnetic radiation in the terahertz range and detector array device comprising said detectors

US8895930B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Jean-Louis Ouvrier-Buffet · Sevrier, FR
• Jerome Meilhan · Grenoble, FR
• Duy Thong N'Guyen · Fontaine, FR
• Francois Simoens · Le Pont-de-Claix, FR

Key dates

• Filing date: Nov 28, 2012
• Grant date: Nov 25, 2014
• Expiry date: Mar 28, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J5/0853
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A bolometric detector of a terahertz radiation, including an assembly reflective for said electromagnetic radiation; at least one bolometric microbridge suspended above the reflective assembly and including a first bowtie antenna, a resistive load coupled with said antenna, and a thermometric element coupled with the resistive load. The reflective assembly includes a reflective layer; an insulating layer on the reflective layer; a periodic array of metallic patterns on the insulating layer, the thickness and the dielectric permittivity of the insulating layer, and the pitch and the filling factor of the array being selected to obtain a constructive interference at the level of said microbridge.