Patent · US Active

Resonator electrodes and related methods and apparatus

US8896188B2 · kind B2 · utility

1Cited by

2References

11Claims

0Family size

Assignee

Sand 9, Inc. · US

Inventors

Jan H. Kuypers · Cambridge, US
Florian Thalmayr · Unterhaching, DE
Alexei Gaidarzhy · Watertown, US
Guiti Zolfagharkhani · Watertown, US

Key dates

Filing date	Apr 10, 2013
Grant date	Nov 25, 2014
Priority date	—
Expiry date	Apr 10, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/241
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Resonator structures and electrodes are described, as well as methods for manufacturing the same. Resonator electrodes may be formed using two or more photolithographic steps and masks, with different masks being used to define different features of the electrodes. The masks may create self-aligned electrodes, which can be aligned with one or more anchors of the resonator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.