Patent · US Active

Micromechanical component and a method for operating a micromechanical component

US8896897B2 · kind B2 · utility

2Cited by

3References

8Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Stefan Pinter · Reutlingen, DE
Joerg Muchow · Reutlingen, DE
Joachim Fritz · Rötteln, DE
Christoph Friese · Reutlingen, DE

Key dates

Filing date	Sep 16, 2009
Grant date	Nov 25, 2014
Priority date	—
Expiry date	Jun 17, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S359/90
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.