Tubular target and production method

US8900340B2 · kind B2 · utility

Assignee

• Plansee SE · AT

Inventors

• Peter Abenthung · Reutte, AT
• Karl Huber · Karlsruhe, DE
• Harald Lackner · Reutte, AT
• Gerhard Leichtfried · Reutte, AT
• Peter Polcik · Reutte, AT
• Christian Weratschnig · Reutte, AT

Key dates

• Filing date: Dec 2, 2011
• Grant date: Dec 2, 2014
• Expiry date: Mar 9, 2032

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C22C1/045
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A tubular target is formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion and it is formed with walls having a wall thickness that increases towards the ends of the tube. The molybdenum tube has a backing tube of titanium or titanium alloy that is attached inside with a material bond connection. Alternatively, the backing tube is formed of austenitic steel or a copper alloy.