Durable conformal wear-resistant carbon-doped metal oxide-comprising coating
US8900695B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2008 |
| Grant date | Dec 2, 2014 |
| Priority date | — |
| Expiry date | Jun 8, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45525
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention is related to carbon-doped metal oxide films. The carbon-doped metal oxide films provide a low coefficient of friction, for example ranging from about 0.05 to about 0.4. In addition, the carbon-doped metal oxide films applied over a silicon substrate, for example, provide anti-stiction properties, where the measured work of adhesion for a MEMS device cantilever beam coated with the carbon-doped metal oxide film is less than 10 μJ/m2. In addition, the carbon-doped metal oxide films provide unexpectedly good water vapor transmission properties. The carbon content in the carbon-doped metal oxide films ranges from about 5 atomic % to about 20 atomic %.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.