Solid-state image pickup element, method of manufacturing the same, and electronic apparatus
US8901618B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2013 |
| Grant date | Dec 2, 2014 |
| Priority date | — |
| Expiry date | Aug 21, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/8057
Abstract
A solid-state imaging device, including a semiconductor substrate; a photoelectric conversion region in the semiconductor substrate that generates charges in response to light incident thereon; an electric charge holding region in the semiconductor substrate and capable of holding electric charges accumulated in the photoelectric conversion region until the electric charges are read out from the electric charge holding region; a transfer gate that effects transfer of electric charges generated in the photoelectric conversion region to the electric charge holding region; a light blocking film over an upper surface of the transfer gate; and an insulating layer over the substrate and between the semiconductor substrate and the light blocking film, wherein, a portion of the insulating layer over the photoelectric conversion region is more thinly formed than the insulating layer not over the photoelectric conversion region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.