Probe card for testing a semiconductor chip
US8901949B2 · kind B2 · utility
1Cited by
2References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2012 |
| Grant date | Dec 2, 2014 |
| Priority date | — |
| Expiry date | May 17, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07378
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a probe card comprising a plurality of probe tips, each being ball-shaped or pillar-shaped and having a top end in contact with each of target chip pads to be tested; a first space converting unit; a second space converting unit; a frame configured to support the second space converting unit; an interposer unit; and a circuit board.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.