Apparatus and method for inspecting matter
US8902416B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2011 |
| Grant date | Dec 2, 2014 |
| Priority date | — |
| Expiry date | Sep 19, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/85
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to an apparatus (10) for inspecting matter (12), the apparatus comprising: an emitting device (14) adapted to emit radiation; a stop element (20) adapted to block some (16a) of the radiation emitted by the emitting device; a scanning device (26) adapted to project a dark area (24) caused by the stop element on the matter, and to redirect radiation (16b) having passed the stop element towards the matter, wherein at least some of the redirected radiation is scattered within the matter and passes out of the matter as scattered radiation (42); and a detection device (34) adapted to receive or detect the scattered radiation via the scanning device, wherein the detection device's field of view (36) coincides with the projected dark area (24). The present invention also relates to a corresponding method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.