Replacement apparatus for an optical element

US8902519B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Jens Kugler · Heubach, DE
• Franz Sorg · Aalen, DE
• Andreas Wurmbrand · Aalen, DE
• Thomas Schletterer · Oberkochen, DE
• Thomas Ittner · Aalen, DE

Key dates

• Filing date: Jun 18, 2013
• Grant date: Dec 2, 2014
• Expiry date: Jun 18, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70825
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.