Patent · US Active

Evaporator with internal restriction

US8904819B2 · kind B2 · utility

0Cited by

241References

16Claims

0Family size

Assignee

SAMSUNG ELECTRONICS CO., LTD. · KR

Inventors

Damien Boesch · San Jose, US
Martin Philip Rosenblum · Menlo Park, US

Key dates

Filing date	Nov 4, 2013
Grant date	Dec 9, 2014
Priority date	—
Expiry date	Nov 4, 2033

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S165/911
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An evaporator includes a vaporization chamber having a monomer inlet and a vapor outlet. There is a vapor nozzle in the vapor outlet. The evaporator also includes a collar positioned between the vaporization chamber and the vapor nozzle which increases the pressure in the evaporation chamber while the conductance through the nozzle is substantially unchanged.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.