Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere
US8904850B1 · kind B1 · utility
9Cited by
13References
16Claims
0Family size
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Key dates
| Filing date | Oct 5, 2011 |
| Grant date | Dec 9, 2014 |
| Priority date | — |
| Expiry date | Oct 7, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
We have demonstrated that a surface acoustic wave (SAW) sensor coated with a nanoporous framework material (NFM) film can perform ultrasensitive water vapor detection at concentrations in air from 0.05 to 12,000 ppmv at 1 atmosphere pressure. The method is extendable to other MEMS-based sensors, such as microcantilevers, or to quartz crystal microbalance sensors. We identify a specific NFM that provides high sensitivity and selectivity to water vapor. However, our approach is generalizable to detection of other species using NFM to provide sensitivity and selectivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.