Vibrating micro-mechanical sensor of angular velocity
US8904865B2 · kind B2 · utility
2Cited by
29References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2010 |
| Grant date | Dec 9, 2014 |
| Priority date | — |
| Expiry date | Nov 7, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5747
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to measuring devices used for measuring angular velocity, and more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention comprises at least two seismic mass structures (1), (2), excitation structures (3), (4) and coupling seesaw type springs (6), (7). The objective of the invention is to provide an improved sensor structure, which enables reliable measuring with good efficiency particularly in small vibrating micro-mechanical angular velocity sensor solutions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.