Corrosion-resistant CMP conditioning tools and methods for making and using same

US8905823B2 · kind B2 · utility

Assignees

• SAINT-GOBAIN ABRASIVES, INC. · US
• SAINT-GOBAIN ABRASIFS · FR

Inventors

• Jianhui Wu · Chengdu, CN
• Taewook Hwang · Acton, US
• Ramanujam Vedantham · Shrewsbury, US
• Charles Dinh-Ngoc · Holliston, US
• Thomas Puthanangady · Shrewsbury, US
• Eric M. Schulz · Worcester, US
• Srinivasan Ramanath · Holden, US

Key dates

• Filing date: Jun 1, 2010
• Grant date: Dec 9, 2014
• Expiry date: Jun 1, 2030

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B24D18/00
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad.