Formed article, method for producing the formed article, member for electronic device, and electronic device
US8906492B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 16, 2010 |
| Grant date | Dec 9, 2014 |
| Priority date | — |
| Expiry date | Mar 24, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31667
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A formed article includes a gas barrier layer that is formed of a material including at least an oxygen atom and a silicon atom, a surface area of the gas barrier layer having an oxygen atom content rate of 60 to 75%, a nitrogen atom content rate of 0 to 10%, and a silicon atom content rate of 25 to 35%, based on the total content of oxygen atoms, nitrogen atoms, and silicon atoms, and having a film density of 2.4 to 4.0 g/cm3. A method of producing a formed article includes implanting ions into a surface layer part of a polysilazane compound-containing layer of a formed body that includes the polysilazane compound-containing layer in its surface layer part. An electronic device member includes the formed article. An electronic device includes the electronic device member. The formed article exhibits an excellent gas barrier capability, excellent folding resistance, and excellent transparency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.