Angular velocity sensor, electronic apparatus, and method of detecting an angular velocity
US8910517B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 2, 2010 |
| Grant date | Dec 16, 2014 |
| Priority date | — |
| Expiry date | Sep 25, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5747
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular velocity sensor includes an annular frame, a drive part, and a detection part. The frame has first beams and second beams. The first beams extend in an a-axis direction and are opposed to each other in a b-axis direction orthogonal to the a-axis direction. The second beams extend in the b-axis direction and are opposed to each other in the a-axis direction. The drive part causes the frame to oscillate within an XY plane to which the a-axis and the b-axis belong, in an oscillation mode where, when one of the first and second beams come closer to each other, the other separates from each other. The detection part detects an angular velocity around an axis in the Z-axis direction orthogonal to the XY plane, based on an amount of deformation of the frame oscillating in the oscillation mode within the XY plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.