Substrate storage container
US8910792B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 24, 2010 |
| Grant date | Dec 16, 2014 |
| Priority date | — |
| Expiry date | Sep 17, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67383
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The position of a substrate temporal placement piece (4) is set so that the substrate temporal placement piece (4) does not overlap a disc-shaped substrate (W) from a viewing direction perpendicular to the surface of the disc-shaped substrate (W), when a lid (20) is attached to a substrate transfer opening (2) of a container main body (1) and the disc-shaped substrate (W) is pressed to a location where the substrate is positioned and held by a back side holding portion (3). Thereby, even if the disc-shaped substrate (W) stored in the container main body (1) is bent due to vibration, impact, etc., there is no danger that the substrate (W) is in contact with the substrate temporal placement piece (4), and the disc-shaped substrate (W) having a larger diameter can be safely stored.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.