Coating based on diamond-like carbon

US8911868B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• Fraunhofer USA · US

Inventors

• Hans-Joachim Scheibe · Dresden, DE
• Thomas Schuelke · Ann Arbor, US
• Lars Haubold · East Lansing, US
• Michael Becker · East Lansing, US
• Yaran Mahmut · East Lansing, US

Key dates

• Filing date: Jul 13, 2012
• Grant date: Dec 16, 2014
• Expiry date: Jan 16, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/30
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A coating based on diamond-like is formed from a plurality of films of diamond-like carbon formed alternatingly over one another and in this respect a film in which no portion or only a much lower portion of doped fluorine is contained. A film in which fluorine or at least fluorine with a higher portion than the film arranged thereunder or thereabove are formed alternatingly over one another. The coating could be manufactured by using a target of pure carbon. Films are deposited on a surface of a substrate by means of a PVD process, with the portion of fluorine contained in doped form. Films are formed alternately being varied by varying a supplied volume flow of a fluorine/carbon compound or sulfur/fluorine compound as a precursor.