Adjustable cathodoluminescence detection system and microscope employing such a system
US8912509B2 · kind B2 · utility
3Cited by
5References
17Claims
0Family size
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Key dates
| Filing date | Apr 29, 2011 |
| Grant date | Dec 16, 2014 |
| Priority date | — |
| Expiry date | Aug 27, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2808
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cathodoluminescence detection system is provided, including a collection optic collecting light radiation coming from a sample illuminated by a charged particle beam and sending the light radiation to an analyzer, a positioner for the collection optic; the positioner including several translation components of the collection optic. Each translation component effects the translation of the collection optic in one dimension of space so that the translation components effect the translation of the collection optic in several dimensions of space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.