Getter structure with optimized pumping capacity
US8912620B2 · kind B2 · utility
1Cited by
1References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2012 |
| Grant date | Dec 16, 2014 |
| Priority date | — |
| Expiry date | Jul 20, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/187
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Getter structure comprising at least one getter portion arranged on a support and including at least two adjacent getter material parts arranged on the support one beside the other, with different thicknesses and of which the surface grain densities are different from one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.