Patent · US Active

Getter structure with optimized pumping capacity

US8912620B2 · kind B2 · utility

1Cited by
1References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 9, 2012
Grant dateDec 16, 2014
Priority date
Expiry dateJul 20, 2032

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/187
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

Getter structure comprising at least one getter portion arranged on a support and including at least two adjacent getter material parts arranged on the support one beside the other, with different thicknesses and of which the surface grain densities are different from one another.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.