Device and method for interferometric vibration measurement of an object

US8913247B2 · kind B2 · utility

Assignee

• Polytec GmbH · CA

Inventors

• Christian Rembe · Waldbronn, DE
• Alexander Drabenstedt · Ettlingen, DE
• Michael Gärtner · Kriftel, DE
• Mike Herberich · Waldbronn, DE
• Andreas Leonhardt · Bretten, DE

Key dates

• Filing date: Oct 19, 2010
• Grant date: Dec 16, 2014
• Expiry date: Jan 30, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G01H9/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A device for interferometric vibration measurement, having a radiation source for generating an original beam, a first beam splitter for dividing it into measuring and reference beams, a detector and a focusing device. The measuring beam at least partly reflected by the object and the reference beam are superimposed on a detection area of the detector, and the focusing device in the beam path of the measuring beam between the image unit and object focuses it onto a measuring point. Here, a measuring beam having a wavelength greater than 1100 nm is generated and the device has an image unit for two-dimensional imaging of the object surrounding the measuring point. The measuring beam focus lies in the focal plane of the image unit and, by use of the focusing device, the focal point of the measuring beam and the focal plane of the imaging unit are displaceable simultaneously.