Patent · US Active

Yaw rate sensor, yaw rate sensor system, and method for operating a yaw rate sensor

US8915137B2 · kind B2 · utility

3Cited by
0References
4Claims
0Family size

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Key dates

Filing dateOct 4, 2010
Grant dateDec 23, 2014
Priority date
Expiry dateAug 8, 2032

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01C19/574
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A yaw rate sensor having a substrate which has a main plane of extension, and a Coriolis element is proposed. The Coriolis element is excitable to a vibration along a third direction which is perpendicular to the main plane of extension. A Coriolis deflection of the Coriolis element along a first direction which is parallel to the main plane of extension may be detected using a detection arrangement. The detection arrangement includes a Coriolis electrode which is connected to the Coriolis element, and a corresponding counterelectrode. Both the Coriolis electrode and the counterelectrode may be excited to a vibration along the third direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.