Patent · US Active

Method for producing an electronic component and electronic component

US8916397B2 · kind B2 · utility

4Cited by

10References

12Claims

0Family size

Assignee

OSRAM Opto Semiconductors GmbH · DE

Inventors

Christian Schmid · San Diego, US
Tilman Schlenker · Nittendorf, DE
Heribert Zull · Regensburg, DE
Ralph Paetzold · Roth, DE
Markus Klein · Glückstadt, DE
Karsten Heuser · Erlangen, DE

Key dates

Filing date	Jan 29, 2009
Grant date	Dec 23, 2014
Priority date	—
Expiry date	Nov 12, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P70/50
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method for producing an electronic component comprising barrier layers for the encapsulation of the component comprises, in particular, the following steps: providing a substrate (1) with at least one functional layer (22), applying at least one first barrier layer (3) on the functional layer (22) by means of plasmaless atomic layer deposition (PLALD), and applying at least one second barrier layer (4) on the functional layer (22) by means of plasma-enhanced chemical vapor deposition (PECVD).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.