Measurement apparatus
US8917900B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 25, 2010 |
| Grant date | Dec 23, 2014 |
| Priority date | — |
| Expiry date | Oct 19, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a measurement apparatus, higher-quality measurement is realized in measurement of measurement object displacement or imaging of a two-dimensional image. In a controller, a light receiving signal of a photodiode is supplied to a displacement measuring unit of a sensor head in order to measure a height of a measurement object, and the height of a surface of the measurement object is measured based on the light receiving signal. Then, in the controller, image obtaining timing is determined based on the height of the measurement object. Specifically, a focus adjustment value corresponding to the computed height of the measurement object is obtained from the table, and an image obtaining signal is transmitted to an imaging device at the timing the focus adjustment value is realized. Therefore, a length between two points on the measurement object is computed from the thus obtained image based on the height of the measurement object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.