Patent · US Active

Infrared sensor comprising tunnel junction for measuring the deformation of a membrane

US8919212B2 · kind B2 · utility

0Cited by

9References

6Claims

0Family size

Assignee

Forschungszentrum Jülich GmbH · DE

Inventors

Herbert Bousack · Aachen, DE
Helmut Soltner · Jülich, DE
Dirk Mayer · Frechen, DE
Marko Banzet · Jülich, DE

Key dates

Filing date	Jul 9, 2011
Grant date	Dec 30, 2014
Priority date	—
Expiry date	Oct 3, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01J5/42
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor array for measuring the deformation of an area caused by a force, comprises a first strip and a second strip arranged in the same plane on the area so as to form a tunnel junction of which at least the first strip is movably arranged on the area so that the gap between the two strips is increased when the area is deformed as a result of the action of the force.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.