Sample support structure and methods
US8920723B2 · kind B2 · utility
9Cited by
7References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 16, 2007 |
| Grant date | Dec 30, 2014 |
| Priority date | — |
| Expiry date | Aug 1, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sample support structure comprising a sample support manufactured from a semiconductor material and having one or more openings therein. Methods of making and using the sample support structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.