High resolution MEMS-based Hadamard spectroscopy
US8922769B2 · kind B2 · utility
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27Claims
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Key dates
| Filing date | Mar 12, 2013 |
| Grant date | Dec 30, 2014 |
| Priority date | — |
| Expiry date | Mar 12, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A spectrometer includes: a collimating element configured for collimating a beam of light into a first one of a cross-dispersing element and an echelle grating, the grating in optical communication with the cross-dispersing element; a focusing element for receiving the light from a second one of the cross-dispersing element and the echelle grating and focusing wavelengths of the light onto a spatial light modulator; the spatial light modulator configured for selectively directing the wavelengths onto a detector for detection. A method of use and the method of fabrication are provided.
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