Spatial splitting-based optical MEMS interferometers
US8922787B2 · kind B2 · utility
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31Claims
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Key dates
| Filing date | Feb 4, 2013 |
| Grant date | Dec 30, 2014 |
| Priority date | — |
| Expiry date | Jul 11, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/16
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A spatial splitting-based optical Micro Electro-Mechanical Systems (MEMS) Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the first interferometer beam and the second interferometer beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.