Microelectromechanical system design and layout
US8924909B2 · kind B2 · utility
1Cited by
10References
10Claims
0Family size
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Key dates
| Filing date | May 31, 2013 |
| Grant date | Dec 30, 2014 |
| Priority date | — |
| Expiry date | May 31, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02T10/82
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Methods for producing layout data for devices are described. One method includes using a genetic algorithm to determine a structure of a thermally-operated actuator. Another method includes receiving a three-dimensional model of a device, a design-rule set, and parameter ranges. Layout data are produced for devices having various combinations of parameter values in the parameter ranges.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.