Method for making a film of uniformly arranged core-shell nanoparticles on a substrate
US8926851B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 2012 |
| Grant date | Jan 6, 2015 |
| Priority date | — |
| Expiry date | Mar 14, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y30/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for making a film of core-shell nanoparticles generally uniformly arranged on a substrate uses atomic layer deposition (ALD) to form the shells. The nanoparticle cores are placed in a solution containing a polymer having an end group for attachment to the cores. The solution is then applied to a substrate and allowed to dry, resulting in the nanoparticle cores being uniformly arranged by the attached polymer chains. ALD is then used to grow the shell material on the cores, using two precursors for the shell material that are non-reactive with the polymer. The polymer chains also form between the cores and the substrate surface, so the ALD forms shell material completely surrounding the cores. The uniformly arranged core-shell nanoparticles can be used as an etch mask to etch the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.