Method of manufacturing a wire grid polarizer
US8927056B2 · kind B2 · utility
2Cited by
2References
11Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 16, 2006 |
| Grant date | Jan 6, 2015 |
| Priority date | — |
| Expiry date | Apr 10, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/3058
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A dielectric layer 2 is formed on a region including grid-shaped convex portions 1a of a resin substrate 1 having the grid-shaped convex portions 1a with pitches of 80 nm to 120 nm on its surface, and metal wires 3 are formed on the dielectric layer 2. It is thereby possible to obtain a wire grid polarizer having a microstructural concavo-convex grid with pitches of the level of 120 nm or less that has not been implemented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.