Patent · US Active

Fluid pressure sensor and measurement probe

US8931347B2 · kind B2 · utility

37Cited by

4References

34Claims

0Family size

Assignee

Openfield SA · FR

Inventors

Eric Donzier · Paris, FR
Emmanuel Tavernier · Paris, FR

Key dates

Filing date	Dec 7, 2012
Grant date	Jan 13, 2015
Priority date	—
Expiry date	Jul 17, 2033

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C1/00134
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A fluid pressure measurement sensor (11) comprises a microelectromechanical system (MEMS) chip (23). The MEMS chip (23) comprises two lateral walls (56), a sensitive membrane (49) connected to said lateral walls (56) and sealed cavity (9). The exterior surfaces of the lateral walls (56) and the sensitive membrane (49) are exposed to the fluid pressure. The lateral walls (56) are designed to subject the sensitive membrane (49) to a compression stress transmitted by the opposite lateral walls (56) where said lateral walls (56) are connected to the sensitive membrane (49) such that the sensitive membrane (49) works in compression only. The MEMS chip (23) also comprises a stress detection circuit (31) to measure the compression state of the sensitive membrane (49) which is proportional to the fluid pressure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.