Gas supply apparatus equipped with vaporizer
US8931506B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2009 |
| Grant date | Jan 13, 2015 |
| Priority date | — |
| Expiry date | Apr 2, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/6606
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An energy-saving, downsized gas supply apparatus equipped with a vaporizer is provided, wherein the gas supply apparatus is capable of stably and easily performing highly accurate gas flow rate control without requiring rigorous temperature control on the vaporizer side. The present invention pertains to a gas supply apparatus equipped with a vaporizer that includes (a) a liquid receiving tank; (b) a vaporizer that vaporizes liquid; (c) a high-temperature type pressure type flow rate control device that adjusts a flow rate of a vaporized gas; and (d) heating devices that heat the vaporizer, the high-temperature type pressure type flow rate control device, and desired portions of pipe passages connected to the vaporizer and the high-temperature type pressure type flow rate control device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.