Zinc oxide precursor and method of depositing zinc oxide-based thin film using the same
US8932389B2 · kind B2 · utility
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Key dates
| Filing date | Nov 19, 2012 |
| Grant date | Jan 13, 2015 |
| Priority date | — |
| Expiry date | Nov 19, 2032 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/407
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A zinc oxide precursor for use in deposition of a zinc oxide-based thin film contains a zincocene having the following formula or a derivative thereof:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.