Semiconductor switch device and method of manufacturing semiconductor switch device
US8933497B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 15, 2011 |
| Grant date | Jan 13, 2015 |
| Priority date | — |
| Expiry date | Nov 15, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/038
Abstract
A semiconductor switch device and a method of manufacturing the semiconductor switch device are provided. The semiconductor switch device includes semiconductor elements on a single semiconductor substrate. At least one of the semiconductor elements constitutes a switch circuit and at least one other of the semiconductor elements constitutes a logic (connection) circuit. Each semiconductor element includes a recess, a gate electrode in the recess, a drain electrode, and a source electrode. In one representative aspect, the gate electrode in the switch circuit can have a rectangular external shape in section, and the gate electrode in the connection circuit has a shape in section other than rectangular.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.