Patent · US Active

Semiconductor apparatus and method of fabrication for a semiconductor apparatus

US8933525B2 · kind B2 · utility

1Cited by
4References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 31, 2010
Grant dateJan 13, 2015
Priority date
Expiry dateMay 31, 2030

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02P70/50

Abstract

The invention relates to a semiconductor apparatus and a method of fabrication for a semiconductor apparatus, whereby the semiconductor apparatus includes a semiconductor layer and a passivation layer arranged on a surface of the semiconductor layer and serving for passivating the semiconductor layer surface, whereby the passivation layer comprises a chemically passivating passivation sublayer and a field-effect-passivating passivation sublayer, which are arranged one above the other on the semiconductor layer surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.