Bundle-guiding optical collector for collecting the emission of a radiation source

US8934085B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Udo Dinger · Oberkochen, DE
• Christopher Weth · Aalen, DE

Key dates

• Filing date: Mar 17, 2010
• Grant date: Jan 13, 2015
• Expiry date: Aug 14, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K2201/064
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A bundle-guiding optical collector collects an emission of a radiation source and forms a radiation bundle from the collected emission. A reflective surface of the collector is the first bundle-forming surface downstream of the radiation source. The reflective surface is formed such that it converts the radiation source into a family of images in a downstream plane. The family of images includes a plurality of radiation source images which are offset to each other in two dimensions (x, y) in a direction perpendicular to the beam direction of the transformed radiation bundle and are arranged relative to each other in a non-rotationally symmetric manner relative to the beam direction of the transformed radiation bundle. The transformed radiation bundle in the downstream plane has a non-rotationally symmetric bundle edge contour relative to the beam direction of the transformed radiation bundle. The result is a collector in which the radiation bundle shape generated by the collector. In other words, the illumination distribution generated by the collector in a defined manner in the plane downstream of the collector has a shape which is freely selectable to the greatest possible extent…